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I. technical requirements for SiH4 gas pipelines (self ignited, inflammable gases)            SiH4 pipe adopts double casing connection mode, inner tube uses SS316L EP (electronic polishing) stainless steel tube, outer tube uses SS316LBA stainless steel tube, three through double set of finished products, elbow automatic welding, automatic rail argon arc welding for inner and outer pipe connection, equipment and valve without flanges, card sleeve or threaded connection, terminal The diaphragm valve adopts VCR joint.            The stainless steel pipe should be argon arc welding to prevent the inner wall of the pipe from producing the oxide film and the dust particles. The clean argon protection should be passed through the filter of 0.01 m to 0.03 Mu filter. When the pipe connection is suspended, it should be filled with high pure Ar protection and the pipe head is blocked by plastic cap.            Requirements and requirements for test pressure of pipeline system            1) intensity test: the experimental pressure is 0.6Mpa, the experimental medium is high purity nitrogen, and the pressure inside 30min does not drop to be qualified.            2) tightness test: the experimental pressure is 0.5Mpa, the experimental medium is high purity nitrogen, the experimental time is 24H, the pressure does not drop to be qualified.            3) helium test: the test medium is high purity helium, and the leakage rate is 1*10-9 atm.cc/sec            Two. Technical requirements for NH3 gas pipelines (poisonous rot gases)            NH3 pipeline adopts SS316L EP (electronic polishing) stainless steel pipe, three through three pass finished product, more than 1/2 "elbow with finished elbow, less than 1/2" elbow to use elbow pipe construction, pipe connection using automatic rail argon arc welding; equipment, valve without flange, card or thread connection; pipeline whole temperature constant heat companion; terminal diaphragm valve VCR joint is used.            The stainless steel pipe should be argon arc welding to prevent the inner wall of the pipe from producing the oxide film and the dust particles to invade. It should be protected by the clean argon filtered through 0.01 m to 0.03 Mu filter. When the pipe connection is suspended, the pipe should be filled with Ar protection and the pipe head is blocked by plastic cap.            Requirements and requirements for 3. pipe system test pressure            1) intensity test: the experimental pressure is 0.6Mpa, the experimental medium is high purity nitrogen, and the pressure inside 30min does not drop to be qualified.            2) tightness test: the experimental pressure is 0.5Mpa, the experimental medium is high purity nitrogen, the experimental time is 24H, the pressure does not drop to be qualified.            3) helium test: the test medium is high purity helium, and the leakage rate is 1*10-9 atm.cc/sec